Onto Innovation Inc. engages in the design, development, manufacture, and support of process control tools that performs macro defect inspection and 2D/3D optical metrology, lithography systems, and process control analytical software worldwide. It offers process and yield management solutions, and device packaging and test facilities through standalone systems for macro-defect inspection, packaging lithography, probe card test and analysis, and transparent and opaque thin film measurements; and process control software portfolio that includes solutions for standalone tools, groups of tools, and enterprise-or factory-wide suites. The company also provides spare parts and software licensing services. Its products are used by semiconductor and advanced packaging device manufacturers; silicon wafer; light emitting diode; vertical-cavity surface-emitting laser; micro-electromechanical system; CMOS image sensor; power device; RF filter; data storage; and various industrial and scientific applications. The company was formerly known as Rudolph Technologies, Inc. Onto Innovation Inc. was founded in 1940 and is headquartered in Wilmington, Massachusetts.

Onto Innovation Inc.

Statement of Changes in Beneficial Ownership

Amended Statement of Beneficial Ownership

Initial Statement of Beneficial Ownership

Insider	Title	Date	Shares	% Owned	Market Value
Michael P. Plisinski	CEO & Director Show All	2024-03-25	201.43K	0.40789%	$37.14M
Christine A. Tsingos	Independent Director Show All	2024-05-22	42.11K	0.08527%	$7.76M
Christopher A. Seams	Independent Director, Director, Independent Chairman Show All	2024-05-22	34.83K	0.07053%	$6.42M
Leo Berlinghieri	Independent Director Show All	2024-05-22	19.4K	0.03929%	$3.58M
Srinivas Vedula	Senior Vice President of Customer Success Group Show All	2024-09-03	16.05K	0.0325%	$2.96M
Steven R. Roth
David B. Miller
Robert Fiordalice
Ju Jin
May Su
Yoon Ah E. Oh
D. Mayson Brooks
Karen M. Rogge
Stephen D. Kelley
Mark R. Slicer