Onto Innovation Inc. engages in the design, development, manufacture, and support of process control tools that performs macro defect inspection and 2D/3D optical metrology, lithography systems, and process control analytical software worldwide. It offers process and yield management solutions, and device packaging and test facilities through standalone systems for macro-defect inspection, packaging lithography, probe card test and analysis, and transparent and opaque thin film measurements; and process control software portfolio that includes solutions for standalone tools, groups of tools, and enterprise-or factory-wide suites. The company also provides spare parts and software licensing services. Its products are used by semiconductor and advanced packaging device manufacturers; silicon wafer; light emitting diode; vertical-cavity surface-emitting laser; micro-electromechanical system; CMOS image sensor; power device; RF filter; data storage; and various industrial and scientific applications. The company was formerly known as Rudolph Technologies, Inc. Onto Innovation Inc. was founded in 1940 and is headquartered in Wilmington, Massachusetts.

Onto Innovation Inc.

Statement of Changes in Beneficial Ownership

Amended Statement of Beneficial Ownership

Initial Statement of Beneficial Ownership

Insider	Title	Transaction Type	Shares Traded	% of Shares Traded	% Chg. in Shares	End of Filing Shares	Price	Transaction Value	Filing Date	Transaction Date
D. Mayson Brooks	Former Vice President of Global Sales and Field Operations Show All	Sale to Issuer (Sale)	-224	-0.000453%	-6.89%	3.03K	$213.22 - $213.22	-$47.76K	04 Sep 2024	01 Sep 2024 - 01 Sep 2024
Srinivas Vedula	Senior Vice President of Customer Success Group Show All	Sale to Issuer (Sale)	-280	-0.000566%	-1.71%	16.05K	$213.22 - $213.22	-$59.7K	04 Sep 2024	30 Aug 2024 - 30 Aug 2024
Srinivas Vedula	Senior Vice President of Customer Success Group Show All	Automatic Disposition (Sale)	-1.28K	-0.002581%	-7.36%	16.05K	$207.24 - $207.24	-$264.23K	04 Sep 2024	03 Sep 2024 - 03 Sep 2024
Stephen S. Schwartz	CEO & President, President, CEO & Director, Director Show All	Other Acquisition (Buy)	661	—	—	661	—	—	22 Aug 2024	20 Aug 2024 - 20 Aug 2024
Srinivas Vedula	Senior Vice President of Customer Success Group Show All	Automatic Disposition (Sale)	-1.49K	-0.003015%	-7.85%	17.43K	$213.4 - $213.4	-$317.11K	11 Jun 2024	10 Jun 2024 - 10 Jun 2024
Mark R. Slicer
Christopher A. Seams
May Su
Christine A. Tsingos
David B. Miller
Leo Berlinghieri
Stephen D. Kelley
Susan D. Lynch
Mark R. Slicer
Yoon Ah E. Oh
Ramil Yaldaei
Srinivas Vedula
Michael P. Plisinski
Yoon Ah E. Oh
Ramil Yaldaei
Ramil Yaldaei
Michael P. Plisinski
Michael P. Plisinski
Robert Fiordalice
Robert Fiordalice
Yoon Ah E. Oh
Yoon Ah E. Oh
Srinivas Vedula
Srinivas Vedula
Mark R. Slicer